Development of High Resolution IGZO-based Electronic Device on Flexible Plastic Substrate
碩士 === 明志科技大學 === 機械工程系機械與機電工程碩士班 === 105 === The purpose of this study was to develop a microelectromechanical sys-tem–compatible process (e.g., etching, lithography, sputtering) for a polyimide (PI) substrate. A thin-film transistor (TFT) array on a flexible PI substrate was demonstrated by fu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35863037451933803159 |