The Effect of Chemical Composition on Porous Etching for Epi and Lift-off Silicon Wafer Process

碩士 === 國立中興大學 === 光電工程研究所 === 105 === The cost of silicon wafer fabrication is about 50% of the total cost of silicon based photovoltaic module, and the solar cell manufacture process and module costs account for another 50%. In conventional silicon photovoltaic value chain, it will waste lots of si...

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Bibliographic Details
Main Authors: Peng-Wei Chen, 陳芃瑋
Other Authors: Han-Wen Liu
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/15199453170982177848