The Effect of Chemical Composition on Porous Etching for Epi and Lift-off Silicon Wafer Process
碩士 === 國立中興大學 === 光電工程研究所 === 105 === The cost of silicon wafer fabrication is about 50% of the total cost of silicon based photovoltaic module, and the solar cell manufacture process and module costs account for another 50%. In conventional silicon photovoltaic value chain, it will waste lots of si...
Main Authors: | Peng-Wei Chen, 陳芃瑋 |
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Other Authors: | Han-Wen Liu |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/15199453170982177848 |
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