Studies on Hydrogenate AZO thin films by DC and RF magnetron sputtering in Room-temperature
碩士 === 國立中興大學 === 光電工程研究所 === 105 === This research utilize DC and RF magnetron sputtering under the premise of keeping total power of 50W by varying various DC and RF power to make hydrogenated aluminum zinc oxide (HAZO) film on the glass substrate at room temperature ，The introduced gas ratio was...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04118025217068525398 |