Effects of different ethylene/argon ratios on the properties of thermal chemical vapor deposition carbon thin films
碩士 === 國立中興大學 === 材料科學與工程學系所 === 105 === This study investigates the effects of different ethylene/argon ratios on the properties of carbon films prepared by thermal chemical vapor deposition. In this experiment, the residual gas on the process, and the thickness and microstructure of carbon films w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93752813808420554682 |