Discussion on Management Technology of Electrostatic control in Semiconductor Factory

碩士 === 國立勤益科技大學 === 資訊工程系 === 105 === With the development of semiconductor process technology, prevention and management of electrostatic discharge have become the product reliability and yield control necessary procedures. Most product circuits and facilities are subject to electrostatic discharge...

Full description

Bibliographic Details
Main Authors: Wei-Ting Yu, 余蔚庭
Other Authors: Wen-Yuan Chen
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/c3s567