A Study on the Optimization of Industrial Cleaning System for High tech TFT LCD Panel
碩士 === 國立成功大學 === 水利及海洋工程學系碩士在職專班 === 105 === This study investigated the process parameter in TFT-LCD substrate industrial cleaning system of a 6th generation substrate factory in Southern Taiwan Science Park. Because substrate manufacture uses an immense amount of water, process parameter optimiza...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/pwrwn3 |