Investigation of AlGaN/GaN HEMT and Its Sensor Electronic Applications

碩士 === 國立成功大學 === 微電子工程研究所 === 105 === In this thesis, aluminum gallium nitride/gallium nitride high electron mobility transistor (AlGaN/GaN HEMT) covered with silicon nitride passivation on silicon substrate were fabricated, the experimental topic is divided into two main part. The effect of differ...

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Bibliographic Details
Main Authors: Chi-PingTseng, 曾濟彬
Other Authors: Shoou-Jinn Chang
Format: Others
Language:en_US
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/n9y9sq