Single-Axis CMOS-MEMS Capacitive Accelerometer with Post-Processing Circuits
碩士 === 國立成功大學 === 電機工程學系 === 105 === Four different structures of single-axis capacitive accelerometers are designed and implemented in this thesis. The four front-end sensors and their back-end signal processing circuits are integrated into a single chip, and two of them (the 1st and 4th accelerome...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/vk6xu7 |