The Effect of Processing on the Resonant Frequencies of AlN Thin Film Bulk Acoustic Wave Resonators

碩士 === 國立成功大學 === 電機工程學系 === 105

Bibliographic Details
Main Authors: Wei-KangLiao, 廖韋綱
Other Authors: Bing-Jing Li
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/5n7yj9