The Effect of Processing on the Resonant Frequencies of AlN Thin Film Bulk Acoustic Wave Resonators

The Effect of Processing on the Resonant Frequencies of AlN Thin Film Bulk Acoustic Wave Resonators

碩士 === 國立成功大學 === 電機工程學系 === 105

Bibliographic Details
Main Authors:	Wei-KangLiao, 廖韋綱
Other Authors:	Bing-Jing Li
Format:	Others
Language:	zh-TW
Published:	2017
Online Access:	http://ndltd.ncl.edu.tw/handle/5n7yj9

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