Nanoindentation Behaviour and Annealed Microstructural Evolution of Ti/GaAs Thin Film
碩士 === 國立成功大學 === 機械工程學系 === 105 === The mechanical properties of Ti/GaAs thin films in room temperatures and annealed indented to different depth are investigated by using a nanoindentation technique. The specimens are annealed at the temperature 490℃ for 36 minutes. After annealed, Ti/GaAs thin fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x528c6 |