Analysis, Design, and Decoupling Control of a Single-Axis Coarse Fine Stage Using Compliant Mechanisms and Rubber Bearings
碩士 === 國立成功大學 === 機械工程學系 === 105 === In precision positioning applications, high-bandwidth, high-stroke, and high-accuracy single-axis coarse fine positioning stages are often proposed and used in precision metrology and manufacturing applications, such as atomic force microscopy, optical focusing s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2zssg7 |