An Opto-mechanical System for Ultra-violet Lithography on the Inner Surface of Hollow Cylinder
碩士 === 國立成功大學 === 機械工程學系 === 105 === Patterning over the inner curved surface is important because it allows to obtain seamless flexible imprinting stamps. However, most of the available methods now are suitable for the roller mold with small size. In this study, a completely modified lithography te...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69bmr5 |