Design, Analysis and Control of a Novel Triaxial Elastomeric Bearing Positioning Stage
碩士 === 國立成功大學 === 機械工程學系 === 105 === Positioning stage plays an important role in precision metrology and manufacturing systems. One key application is the fast steering mirrors, which mainly comprised of a rotational positioning stage and they have been widely used in laser manufacturing related ap...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2k66a2 |