Abnormal Events Analysis of High-tech Factory Operation in Case of the Semiconductors Facility Suppling System
碩士 === 國立交通大學 === 工學院工程技術與管理學程 === 105 === Semiconductor factories need use high-temperature and high-risk machine equipment, a variety of inert, toxic, spontaneous combustion, combustion and flammability of gas, and strong acid or alkali liquid chemicals. However, these gaseous or liquid chemicals...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e726je |