Fabrication and measurement of cobalt disilicide superconducting coplanar waveguide resonators on Si(100) substrates
碩士 === 國立交通大學 === 物理研究所 === 105 === Cobalt disilicide (CoSi2) has been used in silicon-based integrated circuits for many years because of its good conductivity, thermal stability, and epitaxial properties. In 1/f resistance noise study, we found that the noise level of CoSi2/Si heterostructure is m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7a99g7 |