The Study of AP-PECVD Fabricated Ga-doped ZnO Thin Film Transistors with Nitrogen Treatment Using Neutral Beam System
碩士 === 國立交通大學 === 電子研究所 === 105 === Whether the amorphous-silicon thin film transistors (α-Si TFTs) in the beginning, or the low-temperature polycrystalline-silicon thin-film transistors (LTPS TFTs) and amorphous oxide semiconductor thin-film transistors (AOS TFTs) in recent years. There is a tenden...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/utj8kx |