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碩士 === 國立中央大學 === 化學工程與材料工程學系 === 105 === In the semiconductor industry, low thermal budget is a critical topic. A low thermal budget is achieved by using a polymer substrate, a molecular machine, and 3D integration technology, which are associated with a low glass transition point, low decompositio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50233898869887048703 |