Design and fabrication of PDMS/metal bimorph micro-cantilever thermal actuators
碩士 === 國立中央大學 === 機械工程學系 === 105 === Typical micro-thermal actuators are based on the thermal expansion-induced displacement. To generate large displacement, one can use hot-and-cold-arm structures for the in-plane motion, and bimorph cantilever structures for the out-of-plane motion. The later usua...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56773173061004563709 |