Design and Validation of a Spindle and Susceptor Holder for MOCVD Process
碩士 === 國立中央大學 === 機械工程學系 === 105 === Metal-organic Chemical Vapor Deposition (MOCVD) is a chemical vapor deposition method used for production of single or polycrystalline thin films. In order to improve the growth uniformity of thin film, a robust rotating spindle of the process equipment is essent...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/enwv56 |