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碩士 === 國立中央大學 === 機械工程學系 === 105 === In this study, the process of hydrogenated amorphous silicon (a-Si:H) thin films for application in heterojunction with intrinsic layer (HIT) solar cell is prepared by Plasma Enhanced Chemical Vapor Deposition (PECVD). The characterization of plasma process is...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8zyhk9 |