Application of Air washer of Make-up Air Units to Remove Acidic and Basic Gaseous Melecular Pollutants

碩士 === 國立中央大學 === 環境工程研究所在職專班 === 105 === 摘要(英) Airborne molecular contamination (AMC) is chemical contamination in the form of vapors or aerosols, that and has a detrimental effect on a product or a process. The main sources of AMC in cleanrooms are the ambient environments, process chemicals, e...

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Bibliographic Details
Main Authors: Wen-Jui Hsu, 徐文瑞
Other Authors: Ta-Chih hsiao
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/993r27