Application of Air washer of Make-up Air Units to Remove Acidic and Basic Gaseous Melecular Pollutants
碩士 === 國立中央大學 === 環境工程研究所在職專班 === 105 === 摘要(英) Airborne molecular contamination (AMC) is chemical contamination in the form of vapors or aerosols, that and has a detrimental effect on a product or a process. The main sources of AMC in cleanrooms are the ambient environments, process chemicals, e...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/993r27 |