Fabrication of High Quality Polycrystalline Gallium Arsenide Thin Films by Magnetron Sputtering Deposition
碩士 === 國立中央大學 === 光電科學與工程學系 === 105 === In this study, high-quality polycrystalline gallium arsenide thin films have been grown on the germanium silicon substrates by using a magnetic sputtering method. The advantages of the sputtering method were it is a low-cost and secure process method to replac...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37801842201021338919 |