Research of Thin Film Monitoring on Vacuum Deposition
碩士 === 國立中央大學 === 光電科學與工程學系 === 105 === Nowadays, an optical deposition technology is quite important for an optoeletronic industry. Optical thin films are indispensable parts of the accurate optical element. To improve the quality of thin film, it is necessary for the optical monitoring method in a...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x86r8w |