Prognostics and Health Management of a Wafer Handling Robot Arm

碩士 === 國立彰化師範大學 === 機電工程學系所 === 105 === In recent years, the applications of robot arm significantly have been increased due to the industry 4.0 requirement. It is an important equipment of automatic manufacture line for productivity increase and costs reduce. Therefore, when the robot is unexpected...

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Bibliographic Details
Main Authors: Wu,Bo-Han, 吳柏翰
Other Authors: Chung, Kuan-Jung
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/rqmd3z