Epitaxy of GaN films on 2-dimensional MoS2/c-sapphire substrate
碩士 === 國立東華大學 === 材料科學與工程學系 === 105 === In this thesis, we use plasma-enhanced molecular beam epitaxy (PA-MBE) to growth GaN film on different substrates. Then, we use different instruments to characterize GaN films grown on those substrates, and we try to discuss the substrate and annealing effects...
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Format: | Others |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/4qj622 |