Predictive Maintenance Model For Drilling Process of Semiconductor Probe Cards And An Empirical Research for Advanced Process Control

碩士 === 國立清華大學 === 工業工程與工程管理學系所 === 105 === Semiconductor industry develops a series of technology roadmap, for example, International Technology Roadmap for Semiconductors(ITRS) to address rapid changes driven by Moore’s Law. Yield is a factor of keeping competition for the capital-intensive semicon...

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Bibliographic Details
Main Authors: Chen, Shih-Chang, 陳世昌
Other Authors: Chien, Chen-Fu
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/6k57c9