Predictive Maintenance Model For Drilling Process of Semiconductor Probe Cards And An Empirical Research for Advanced Process Control
碩士 === 國立清華大學 === 工業工程與工程管理學系所 === 105 === Semiconductor industry develops a series of technology roadmap, for example, International Technology Roadmap for Semiconductors(ITRS) to address rapid changes driven by Moore’s Law. Yield is a factor of keeping competition for the capital-intensive semicon...
Main Authors: | Chen, Shih-Chang, 陳世昌 |
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Other Authors: | Chien, Chen-Fu |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/6k57c9 |
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