Design and Implementation of a Novel CMOS-MEMS Inductive-type Tactile Sensor with Wireless Sensing Potential
碩士 === 國立清華大學 === 動力機械工程學系 === 105 === This study presents a novel inductive-type tactile sensor with deformable polymer layer. The sensing principle of the structure is mainly dominated by the distance between sensing coil and metal contact interface. After applying the load on the metal contact in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7wn8sv |