Sensitivity Improvement for CMOS-MEMS Capacitive Pressure Sensor Using Double Deformable Diaphragms with Trenches
碩士 === 國立清華大學 === 動力機械工程學系 === 105 === In this study, we present a new high sensitivity absolute capacitive pressure sensor that it is estimated to exert on your phone or tablet and other personal assistant system. The design features of this capacitive pressure sensor are coating Parylene-C to acco...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73sgdj |