Deposition and Annealing Processes of Gate Stacks on 16 nm FinFETs
碩士 === 國立清華大學 === 工程與系統科學系 === 105 === abstract hide
Main Authors: | Lin, Chih-Ju, 林志儒 |
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Other Authors: | ChangLiao, Kuei-Shu |
Format: | Others |
Language: | zh-TW |
Published: |
2017
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Online Access: | http://ndltd.ncl.edu.tw/handle/7z5p8f |
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