Fabrication of the Force-feedback Sensor based on the AlN Doped ZnO Piezoelectric Film
碩士 === 國立臺南大學 === 機電系統工程研究所 === 105 === In recent years, the applications of sensor are growing and maturing. This study is to develop the force feed-back tactile piezoelectric sensor-Aluminum nitride (AlN) doped zinc oxide (ZnO) deposited on the polyimide is used to fabricate the flexible piezoelec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53091384126384684705 |