Data Compression Ratio-aware Routing for Multiple E-Beam Direct Write Systems
碩士 === 國立臺灣大學 === 電子工程學研究所 === 105 === Along with the advancement of technology, the feature size of Integrated Circuits(IC) are shrinking down day after day, but the resolution of the ArF laser is not enough to support next generation lithography. Electron beam lithography have a role to play in ne...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/x59xpu |