Data Compression Ratio-aware Routing for Multiple E-Beam Direct Write Systems

• Main Authors: Yi-An Lee, 李翼安
• Other Authors: Chung-Ping Chen
• Format: Others
• Language: en_US
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/x59xpu

碩士 === 國立臺灣大學 === 電子工程學研究所 === 105 === Along with the advancement of technology, the feature size of Integrated Circuits(IC) are shrinking down day after day, but the resolution of the ArF laser is not enough to support next generation lithography. Electron beam lithography have a role to play in next generation lithography with its characteristic of high-accuracy. In order to support the accuracy of Electron beam, the massive data size of the circuit has to be delivered to the E-beam emitter. However, circuits nowadays have become more complicated. In order to synchronize the operation of Electron beam lithography with data transmission, the successfulness of this process relies on the speed of data transmission, which is not sufficiently fast even with technologies today. So in practice, the massive circuit data should be compressed before transmitted by optic fibers, and then decompressed on the chip of E-beam machines. In this thesis, considering the data arrangement after rasterization, we proposed a method to improve router. Besides, we modify data compression algorithm to support the particular arrangement of data. The results of experiments show that we not only improve data compression ratio with our proposed algorithms but establish a procedure of data transformation for multiple electron beam direct write systems.