The Development and Control of a Long-Stroke Precision Stage: for Fabrification of Large Micro-Structures by Two-Photon Polymerization

碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === This thesis develops a long-stroke precision positioning stage, and applies it to fabricate large micro-structures by two-photon polymerization (TPP). Precision positioning plays an important role as technology develops. Many devices, such as atomic force micro...

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Bibliographic Details
Main Authors: Kuo-An Wang, 王國安
Other Authors: Fu-Cheng Wang
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/59x9tj