The Development and Control of a Long-Stroke Precision Stage: for Fabrification of Large Micro-Structures by Two-Photon Polymerization

• Main Authors: Kuo-An Wang, 王國安
• Other Authors: Fu-Cheng Wang
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/59x9tj

碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === This thesis develops a long-stroke precision positioning stage, and applies it to fabricate large micro-structures by two-photon polymerization (TPP). Precision positioning plays an important role as technology develops. Many devices, such as atomic force microscope and scanning electron microscope, need a high precision actuator. Piezoelectric transducer (PZT) is one of the most widely used material because of its fast response and high-driven force. However, PZT also has many drawbacks, such as hysteresis, creep and limited strokes. As a result, we integrate a PZT stage and a stepper motor stage to achieve high precision with a large stroke. We apply integral control with gain-scheduling to control the PZT stage, and design robust loop-shaping controlwith a feed-forward compensator to control the stepper motors. We then integrate these stages to form a three-axis combined stage. Finally, we implement the combined stage to fabricate large micro structures by two-photon polymerization (TPP). We fabricate three kinds of micro-structures: linear gratings up to 1mm, micro lens with radius of upto 0.2mm by Fresnel zone plate (FZP), and lines upto 1cm. Last, we define performance indexes to quantify the quality of the manufactured samples. The results demonstrates the effectiveness of the developed stage for large-scale micro-structure fabrication.