Precision 2D Servo Design for a Large Stroke Wafer Coplanar Inspection Stage
碩士 === 國立臺灣大學 === 機械工程學研究所 === 105 === This thesis analyze an influence of system identification caused by hardware structure of an air-bearing motion stage. The minute vibration from environment cannot be excluded since this air-bearing stage is not equipped on an optical table. Instead, a vibratio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53mm23 |