Development and Application of Dielectric Heating-assisted Nanoimprint for Sensors
博士 === 國立臺灣大學 === 機械工程學研究所 === 105 === This study developed dielectric heating-assisted nanoimprint lithography (NIL) for fabrication of nanostructures for sensors. Two kinds of dielectric heating sensitivity polymer solution were spin-coated onto different substrates, namely, Polyethylene terephtha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e3fxu9 |