Analysis and Compensation of Angular Positioning Error of Rotary Stages Based on Abbe Principle
博士 === 國立臺灣大學 === 機械工程學研究所 === 105 === Abbe error provides a design guideline for displacement measurement that the measuring axis should be in line with the moving axis. If it not possible, both the offset between two axes and the angular error in linear motion should be known for the consequence o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hbuqw7 |