Crystallization control of Ga-doped zinc oxide films prepared by LPCVD on various substrates
碩士 === 國立臺灣科技大學 === 化學工程系 === 105 === The film growth behavior of Ga-doped ZnO (GZO) prepared using low-pressure chemical vapor deposition (LPCVD) technique has been investigated. The crystal property of GZO films grown on various substrates including glass, c-plane sapphire, c-plane n-type GaN and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bu89t3 |