Study of Low Temperature Alumiminum-induced and Self-assembled Monolayer-assisted Fabrication of Polycrystalline Silicon – the Effect of 3-aminopropyltriethoxysilane
碩士 === 國立臺灣科技大學 === 化學工程系 === 105 === In this research, we focus on how to transfer amorphous silicon (a-Si) to poly-crystalline Si (poly-Si). There are many methods to fabricate poly-Si on glass substrate. Chemical vapor depostition can directly deposit poly-Si on heterogeneous substrate. Solid pha...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h7k6h4 |