Fabrication of Far Infrared Thermal Emitters with Metal Meshed Filters by CMOS and MEMS Processes
碩士 === 國立臺灣科技大學 === 電子工程系 === 105 === In order to improve the performance of the far infrared (FIR) thermal emitters, similar design concept in the prior work are adopted but the device structures and fabrication are investigated to obtain better power conversion efficiency and wavelength selectivit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25512797811882196164 |