Estimation of Nano Mechanical Properties and Interfacial Energy of Copper Thin Film with Tip-Grit AFM Scratch Method
博士 === 國立臺灣科技大學 === 機械工程系 === 105 === This study has developed a model to estimate the material removal mechanism of SiO2 abrasive grit in Cu-CMP process by a dimension of 800 nm SiO2 grit of tip-grit atomic force microscope (TGAFM). The specific scratch energy has been evaluated in various environm...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5my5ej |