Effect of KMnO4 on Multi-Wire Diamond Wire Sawing Process of Mono Crystalline Silicon Carbide Wafer
碩士 === 國立臺灣科技大學 === 機械工程系 === 105 === Monocrystalline Silicon Carbide (SiC) wafer has high breakdown voltage and low impedance properties, compared to other semiconductor materials. It has been a promising material for high power devices and semiconductor. However, Silicon Carbide is high hardness a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/vyrd5t |