Study on Graphene Oxide Hybrid Slurry in Chemical Mechanical Polishing of Monocrystalline Silicon Carbide Wafer
碩士 === 國立臺灣科技大學 === 機械工程系 === 105 === Monocrystalline Silicon Carbide (SiC) substrate has high breakdown voltage and low resistivity electrical properties, which means a great potential for applying in high power devices. However, manufacturing process of SiC wafer take very long processing time and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/h3275y |