Development of Six Degree-of-Freedom Heterodyne Speckle Interferometer
碩士 === 國立臺灣科技大學 === 機械工程系 === 105 === In this study, a novel six-degree-of-freedom (DOF) heterodyne speckle interferometer for displacement and rotation angle precision measurement is proposed. The proposed system is combines the advantages of heterodyne interferometry, speckle interferometry, symme...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6gwh3r |