Development of Six Degree-of-Freedom Heterodyne Speckle Interferometer
碩士 === 國立臺灣科技大學 === 機械工程系 === 105 === In this study, a novel six-degree-of-freedom (DOF) heterodyne speckle interferometer for displacement and rotation angle precision measurement is proposed. The proposed system is combines the advantages of heterodyne interferometry, speckle interferometry, symme...
Main Authors: | Jun-Ting Wu, 吳鈞珽 |
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Other Authors: | Hung-Lin Hsieh |
Format: | Others |
Language: | zh-TW |
Published: |
2017
|
Online Access: | http://ndltd.ncl.edu.tw/handle/6gwh3r |
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