Analysis of Specific Resistance of Vanadium and Vanadium Oxide

碩士 === 國立虎尾科技大學 === 光電工程系光電與材料科技碩士班 === 105 === In this study, the Specific Resistance analysis of amorphous vanadium oxide, vanadium oxide film were prepared by DC magnetron sputtering on silicon, prepare temperature at 300℃ to 400℃,film thickness at 100 to 200nm, Using different methods of analysi...

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Bibliographic Details
Main Authors: Yi-Yu Tsai, 蔡翊佑
Other Authors: 陳文瑞
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/j9rh23